Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998. === Includes bibliographical references. === by Suman K. Banerjee. === Ph.D.

Bibliographic Details
Main Author:	Banerjee, Suman K. (Suman Kumar), 1972-
Other Authors:	Klavs F. Jensen.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2009
Subjects:	Chemical Engineering
Online Access:	http://hdl.handle.net/1721.1/49640

id	ndltd-MIT-oai-dspace.mit.edu-1721.1-49640
record_format	oai_dc
spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-496402019-05-02T16:28:36Z Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes Banerjee, Suman K. (Suman Kumar), 1972- Klavs F. Jensen. Massachusetts Institute of Technology. Dept. of Chemical Engineering Chemical Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998. Includes bibliographical references. by Suman K. Banerjee. Ph.D. 2009-11-06T16:13:01Z 2009-11-06T16:13:01Z 1998 1998 Thesis http://hdl.handle.net/1721.1/49640 40073590 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 186 leaves application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Chemical Engineering
spellingShingle	Chemical Engineering Banerjee, Suman K. (Suman Kumar), 1972- Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes
description	Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998. === Includes bibliographical references. === by Suman K. Banerjee. === Ph.D.
author2	Klavs F. Jensen.
author_facet	Klavs F. Jensen. Banerjee, Suman K. (Suman Kumar), 1972-
author	Banerjee, Suman K. (Suman Kumar), 1972-
author_sort	Banerjee, Suman K. (Suman Kumar), 1972-
title	Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes
title_short	Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes
title_full	Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes
title_fullStr	Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes
title_full_unstemmed	Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes
title_sort	nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes
publisher	Massachusetts Institute of Technology
publishDate	2009
url	http://hdl.handle.net/1721.1/49640
work_keys_str_mv	AT banerjeesumanksumankumar1972 nonlinearmodelreductionmethodsforrapidthermalandchemicalvapordepositionprocesses
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Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes

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