Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes

Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998. === Includes bibliographical references. === by Suman K. Banerjee. === Ph.D.

Bibliographic Details
Main Author: Banerjee, Suman K. (Suman Kumar), 1972-
Other Authors: Klavs F. Jensen.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2009
Subjects:
Chemical Engineering
Online Access:http://hdl.handle.net/1721.1/49640

Internet

http://hdl.handle.net/1721.1/49640

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