Phase field model for precipitates in crystals
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2008. === Includes bibliographical references (p. 261-270). === Oxygen precipitate caused by oxygen supersaturation is the most common and important defects in Czochralski (CZ) silicon. The presence of oxygen prec...
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Format: | Others |
Language: | English |
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Massachusetts Institute of Technology
2009
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Online Access: | http://hdl.handle.net/1721.1/46020 |