Design and analysis of a monolithic flexure atomic force microscope
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008. === Includes bibliographical references (p. 175-178). === This thesis details the design, manufacture, and testing of a sub-nanometer accuracy atomic force microscope. It was made to be integrated into the S...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1721.1/45201 |