Salty development of an optical photoresist
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Physics, 2008. === Includes bibliographical references (leaf 26). === In this series of experiments, we add salt to a photoresist developer and observe the effect on photoresist contrast. In order to measure contrast, we designed an anti...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1721.1/44823 |