Variation reduction in a wafer fabrication line through inspection optimization

Variation reduction in a wafer fabrication line through inspection optimization

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997, and Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1997. === Includes bibliographical references (p. 44). === by John W. Bean. === M.S.

Bibliographic Details
Main Author: Bean, John W. (John Wellard)
Other Authors: Tom Eagar, Roy Welsch.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2008
Subjects:
Materials Science and Engineering
Sloan School of Management
Online Access:http://hdl.handle.net/1721.1/43446

Internet

http://hdl.handle.net/1721.1/43446

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