Direct printing of lead zirconate titanate thin films
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008. === Includes bibliographical references (leaves 42-44). === Thus far, use of lead zirconate titanate (PZT) in MEMS has been limited due to the lack of process compatibility with existing MEMS manufacturing t...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1721.1/43136 |