Efficient tools for the design and simulation of microelectromechanical and microfluidic systems
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2007. === Includes bibliographical references (p. 131-136). === In air-packaged surface micromachined devices and microfluidic devices the surface to volume ratio is such that drag forces pl...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2009
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| Online Access: | http://dspace.mit.edu/handle/1721.1/42234 http://hdl.handle.net/1721.1/42234 |