Design of an STM and EPL control system and linear actuator preload diaphragm
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2007. === This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. === Includes bibliographical references (p. 53-54). ===...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/40310 |