A large strain piezoelectric microactuator by folding assembly
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2007. === Includes bibliographical references (leaves 65-68). === In-plane amplification of thin film piezoelectric strain has been previously demonstrated using mechanical flexures fabricated at the micro scale....
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1721.1/39890 |