Room temperature micromachined microbolometers for W-band (75 GHz-110 GHz) focal plane imaging array

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. === Includes bibliographical references (p. 80-86). === by Ariful Rahman. === M.S.

Bibliographic Details
Main Author: Rahman, Arifur, 1970-
Other Authors: Qing Hu.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2007
Subjects:
Online Access:http://hdl.handle.net/1721.1/38847