Design and implementation of a high precision profilometer

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. === Includes bibliographical references (p. 113-117 [i.e. p. [86]-[88]). === A high precision profilometry system was developed primarily for the inspection of two-sided sample specimens. Based upon system s...

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Bibliographic Details
Main Author: Kwok, Tarzen
Other Authors: Kamal Youcef-Toumi.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2007
Subjects:
Online Access:http://hdl.handle.net/1721.1/38196