Deposition and planarization of epitaxial oxide thin films for high temperature superconducting device applications
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. === Includes bibliographical references (leaves 265-274). === by Bertha Pi-Ju Chang. === Ph.D.
Main Author: | Chang, Bertha Pi-Ju |
---|---|
Other Authors: | Michel J. Cima. |
Format: | Others |
Language: | English |
Published: |
Massachusetts Institute of Technology
2007
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/38087 |
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