Deposition and planarization of epitaxial oxide thin films for high temperature superconducting device applications

Deposition and planarization of epitaxial oxide thin films for high temperature superconducting device applications

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. === Includes bibliographical references (leaves 265-274). === by Bertha Pi-Ju Chang. === Ph.D.

Bibliographic Details
Main Author: Chang, Bertha Pi-Ju
Other Authors: Michel J. Cima.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2007
Subjects:
Materials Science and Engineering
Online Access:http://hdl.handle.net/1721.1/38087

Internet

http://hdl.handle.net/1721.1/38087

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