A laser-assisted microchemistry system for the fabrication of small electromechanical devices

A laser-assisted microchemistry system for the fabrication of small electromechanical devices

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994. === Includes bibliographical references (leaves 80-82). === by Nick I. Nassuphis. === M.S.

Bibliographic Details
Main Author: Nassuphis, Nick I
Other Authors: D.J. Ehrlich, A. Slocum.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2007
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/36928
Description
Summary:Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994. === Includes bibliographical references (leaves 80-82). === by Nick I. Nassuphis. === M.S.

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