A laser-assisted microchemistry system for the fabrication of small electromechanical devices
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994. === Includes bibliographical references (leaves 80-82). === by Nick I. Nassuphis. === M.S.
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2007
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| Online Access: | http://hdl.handle.net/1721.1/36928 |