Design, fabrication, and testing of a three-dimensional monolithic compliant six-axis nanopositioner
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006. === Includes bibliographical references (leaf 36). === The purpose of this research was to demonstrate the feasibility for creating a three-dimensional monolithic compliant six-axis nanopositioner. Much of t...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2007
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| Online Access: | http://hdl.handle.net/1721.1/36741 |