Epitaxial silicon growth rate control
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. === Title as it appears in the June 1994 MIT Graduate List: Real time growth rate control of epitaxial silicon. === Includes bibliographical references (leaves 65-66). === by Safroadu...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2007
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| Online Access: | http://hdl.handle.net/1721.1/36449 |