Real time interferometric imaging of the plasma etch process
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. === Includes bibliographical references (leaves 51-52). === by Jonathan L. Claman. === M.Eng.
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2007
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| Online Access: | http://hdl.handle.net/1721.1/35386 |