An experimental study and modeling of Transformer-Coupled Toroidal Plasma processing of materials
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Physics, 2006. === Includes bibliographical references (p. 287-304). === The Transformer Coupled Toroidal Plasma (TCTP) source uses a high power density plasma formed in a toroidal-shaped chamber by transformer coupling using a magneti...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2007
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| Online Access: | http://dspace.mit.edu/handle/1721.1/34975 http://hdl.handle.net/1721.1/34975 |