Magnetic properties of lithographically patterned thin film magnetic elements for magnetic random access memory applications
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2003. === Includes bibliographical references (p. 133-139). === Interference lithography, together with ion beam etching or lift-off processes, has been utilized to produce large area periodic rectang...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/29970 |