Modeling of chemical mechanical polishing for shallow trench isolation
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002. === Includes bibliographical references (p. 195-201). === This thesis presents the nonlinear analysis, design, fabrication, and testing of an axial-gap magnetic induction micro machine...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/29907 |