Multiscale models of the metalorganic vapor phase epitaxy process
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2000. === Includes bibliographical references. === This thesis develops modeling techniques for chemical vapor deposition processes, specifically metalorganic vapor phase epitaxy (MOVPE). The difficulty in creating...
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| Format: | Others |
| Language: | en_US |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/26883 |