A heat flow problem in electron beam etching of thin films

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1959. === Includes bibliographical references (leaves 65-67). === by Francis Keith Reed. === M.S.

Bibliographic Details
Main Author:	Reed, Francis Keith
Other Authors:	Ewan W. Fletcher.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering
Online Access:	http://hdl.handle.net/1721.1/15821

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spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-158212019-05-02T16:25:07Z A heat flow problem in electron beam etching of thin films Reed, Francis Keith Ewan W. Fletcher. Massachusetts Institute of Technology. Dept. of Electrical Engineering Electrical Engineering Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1959. Includes bibliographical references (leaves 65-67). by Francis Keith Reed. M.S. 2005-08-04T17:23:01Z 2005-08-04T17:23:01Z 1959 Thesis http://hdl.handle.net/1721.1/15821 08060626 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 67 leaves 4117466 bytes 4117224 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Electrical Engineering
spellingShingle	Electrical Engineering Reed, Francis Keith A heat flow problem in electron beam etching of thin films
description	Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1959. === Includes bibliographical references (leaves 65-67). === by Francis Keith Reed. === M.S.
author2	Ewan W. Fletcher.
author_facet	Ewan W. Fletcher. Reed, Francis Keith
author	Reed, Francis Keith
author_sort	Reed, Francis Keith
title	A heat flow problem in electron beam etching of thin films
title_short	A heat flow problem in electron beam etching of thin films
title_full	A heat flow problem in electron beam etching of thin films
title_fullStr	A heat flow problem in electron beam etching of thin films
title_full_unstemmed	A heat flow problem in electron beam etching of thin films
title_sort	heat flow problem in electron beam etching of thin films
publisher	Massachusetts Institute of Technology
publishDate	2005
url	http://hdl.handle.net/1721.1/15821
work_keys_str_mv	AT reedfranciskeith aheatflowprobleminelectronbeametchingofthinfilms AT reedfranciskeith heatflowprobleminelectronbeametchingofthinfilms
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A heat flow problem in electron beam etching of thin films

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