A heat flow problem in electron beam etching of thin films

A heat flow problem in electron beam etching of thin films

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1959. === Includes bibliographical references (leaves 65-67). === by Francis Keith Reed. === M.S.

Bibliographic Details
Main Author: Reed, Francis Keith
Other Authors: Ewan W. Fletcher.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering
Online Access:http://hdl.handle.net/1721.1/15821

Internet

http://hdl.handle.net/1721.1/15821

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