Application of micromachined structures to the study of mechanical properties and adhesion of thin films

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1986. === MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING === Bibliography: leaves 131-141. === by Mehran Mehregany. === M.S.

Bibliographic Details
Main Author:	Mehregany, Mehran
Other Authors:	Stephen D. Senturia.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/15012

id	ndltd-MIT-oai-dspace.mit.edu-1721.1-15012
record_format	oai_dc
spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-150122019-05-02T16:16:35Z Application of micromachined structures to the study of mechanical properties and adhesion of thin films Mehregany, Mehran Stephen D. Senturia. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1986. MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING Bibliography: leaves 131-141. by Mehran Mehregany. M.S. 2005-08-08T16:48:09Z 2005-08-08T16:48:09Z 1986 1986 Thesis http://hdl.handle.net/1721.1/15012 15204495 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 [1], 141 [i.e. 142] leaves 10695165 bytes 10694923 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Electrical Engineering and Computer Science.
spellingShingle	Electrical Engineering and Computer Science. Mehregany, Mehran Application of micromachined structures to the study of mechanical properties and adhesion of thin films
description	Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1986. === MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING === Bibliography: leaves 131-141. === by Mehran Mehregany. === M.S.
author2	Stephen D. Senturia.
author_facet	Stephen D. Senturia. Mehregany, Mehran
author	Mehregany, Mehran
author_sort	Mehregany, Mehran
title	Application of micromachined structures to the study of mechanical properties and adhesion of thin films
title_short	Application of micromachined structures to the study of mechanical properties and adhesion of thin films
title_full	Application of micromachined structures to the study of mechanical properties and adhesion of thin films
title_fullStr	Application of micromachined structures to the study of mechanical properties and adhesion of thin films
title_full_unstemmed	Application of micromachined structures to the study of mechanical properties and adhesion of thin films
title_sort	application of micromachined structures to the study of mechanical properties and adhesion of thin films
publisher	Massachusetts Institute of Technology
publishDate	2005
url	http://hdl.handle.net/1721.1/15012
work_keys_str_mv	AT mehreganymehran applicationofmicromachinedstructurestothestudyofmechanicalpropertiesandadhesionofthinfilms
_version_	1719037780280999936

Application of micromachined structures to the study of mechanical properties and adhesion of thin films

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