Application of micromachined structures to the study of mechanical properties and adhesion of thin films

Application of micromachined structures to the study of mechanical properties and adhesion of thin films

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1986. === MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING === Bibliography: leaves 131-141. === by Mehran Mehregany. === M.S.

Bibliographic Details
Main Author: Mehregany, Mehran
Other Authors: Stephen D. Senturia.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/15012

Internet

http://hdl.handle.net/1721.1/15012

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