Sol-gel derived tantalum oxide thin films

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1987. === Vita. === Bibliography: leaves 183-185. === by Lee Arnold Silverman. === Ph.D.

Bibliographic Details
Main Author: Silverman, Lee Arnold, 1959-
Other Authors: Donald R. Uhlmann.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/14835