Sol-gel derived tantalum oxide thin films
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1987. === Vita. === Bibliography: leaves 183-185. === by Lee Arnold Silverman. === Ph.D.
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Format: | Others |
Language: | English |
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Massachusetts Institute of Technology
2005
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Online Access: | http://hdl.handle.net/1721.1/14835 |