Controlled and explosive silicidation of metal/amorphous-silicon multilayer thin films

Controlled and explosive silicidation of metal/amorphous-silicon multilayer thin films

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1989. === Includes bibliographical references. === by Lawrence Alfred Clevenger. === Ph.D.

Bibliographic Details
Main Author: Clevenger, Lawrence Alfred
Other Authors: Carl V. Thompson.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Materials Science and Engineering.
Online Access:http://hdl.handle.net/1721.1/14210

Internet

http://hdl.handle.net/1721.1/14210

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