Interactions of Kr(F₂), O₂, and (O₂)₂ with Si(100)
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, February, 2021 === Cataloged from the official PDF of thesis. "February 2021." === Includes bibliographical references. === The high reactivity of XeF₂ with fluorinated Si is proposed to arise from localized vi...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2021
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/1721.1/130827 |