A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. === Includes bibliographical references. === by Kuo-Shen Chen. === M.S.

Bibliographic Details
Main Author:	Chen, Kuo-Shen, 1966-
Other Authors:	David L. Trumper.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering
Online Access:	http://hdl.handle.net/1721.1/11506

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spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-115062019-05-02T16:14:09Z A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage Chen, Kuo-Shen, 1966- David L. Trumper. Massachusetts Institute of Technology. Dept. of Mechanical Engineering Mechanical Engineering Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. Includes bibliographical references. by Kuo-Shen Chen. M.S. 2005-08-17T19:06:02Z 2005-08-17T19:06:02Z 1995 1995 Thesis http://hdl.handle.net/1721.1/11506 33601749 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 1 v. (various pagings) 14603183 bytes 14602941 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Mechanical Engineering
spellingShingle	Mechanical Engineering Chen, Kuo-Shen, 1966- A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage
description	Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. === Includes bibliographical references. === by Kuo-Shen Chen. === M.S.
author2	David L. Trumper.
author_facet	David L. Trumper. Chen, Kuo-Shen, 1966-
author	Chen, Kuo-Shen, 1966-
author_sort	Chen, Kuo-Shen, 1966-
title	A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage
title_short	A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage
title_full	A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage
title_fullStr	A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage
title_full_unstemmed	A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage
title_sort	spring-dominated regime design of a high load capacity, electromagnetically driven x-y-[theta] stage
publisher	Massachusetts Institute of Technology
publishDate	2005
url	http://hdl.handle.net/1721.1/11506
work_keys_str_mv	AT chenkuoshen1966 aspringdominatedregimedesignofahighloadcapacityelectromagneticallydrivenxythetastage AT chenkuoshen1966 springdominatedregimedesignofahighloadcapacityelectromagneticallydrivenxythetastage
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A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage

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