A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage

A spring-dominated regime design of a high load capacity, electromagnetically driven X-Y-[theta] stage

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. === Includes bibliographical references. === by Kuo-Shen Chen. === M.S.

Bibliographic Details
Main Author: Chen, Kuo-Shen, 1966-
Other Authors: David L. Trumper.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/11506

Internet

http://hdl.handle.net/1721.1/11506

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