Analysis of Mo sidewall ohmic contacts to InGaAs fins
Thesis: S.M. in Electrical Engineering, Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2017. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 79-80). === As transistor size is scaled down, the performance is d...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2017
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| Online Access: | http://hdl.handle.net/1721.1/108987 |