Design and control of high-speed and large-range atomic force microscope
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2015. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 217-227). === This thesis presents the design, control and instrumentation of a novel atomic force microscope (A...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2015
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| Online Access: | http://hdl.handle.net/1721.1/100145 |