Non-contact internal probing of high speed microelectronic circuits using electrostatic force microscopy
Continuing progress in the microelectronics world has enabled the development of faster, denser and more complicated circuits. These technological advancements have rendered the internal probing of these circuits both difficult and necessary for performance evaluation and failure analysis. Existing...
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| Language: | en_US |
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2007
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| Online Access: | http://hdl.handle.net/1993/965 |