Development of a ZeptoFarad (10S-2[1] F) resolution capacitance sensor for scanning capacitance microscopy
Here we present a technique, the Schottky Scanning Capacitance Microscopy (SSCM) developed by the University of Manitoba SPM lab, for measuring carrier profiles on semiconductor device cross-sections. SSCM utilizes a sharp conducting probe tip that is raster scanned in contact with the sample surfac...
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| Language: | en_US |
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2007
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| Online Access: | http://hdl.handle.net/1993/2539 |