Intrinsic Stress and High Temperature Properties of Metal-Containing Hydrogenated Amorphous Carbon Coatings
A detailed examination of the intrinsic stress development and mechanical properties of titanium-containing hydrogenated amorphous carbon (Ti-C:H) and W-C:H coatings, deposited in an inductively coupled plasma (ICP) assisted hybrid chemical/physical vapor deposition (CVD/PVD) environment was carrie...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en |
| Published: |
LSU
2005
|
| Subjects: | |
| Online Access: | http://etd.lsu.edu/docs/available/etd-04202005-161203/ |