Modeling and Simulation of Surface Profile Forming Process of Microlenses and Their Application in Optical Interconnection Devices
Free space micro-optical systems require to integrate microlens array, micromirrors, optical waveguides, beam splitter, etc. on a single substrate. Out-of-plane microlens array fabricated by direct lithography provides pre-alignment during mask fabrication stage and has the advantage of mass manufac...
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| Format: | Others |
| Language: | en |
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LSU
2013
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| Online Access: | http://etd.lsu.edu/docs/available/etd-04152013-074355/ |