Ultra Deep SU-8 Manufacturing and Characterization for MEMS Applications
The Micro Systems Engineering Team (mSET) at Louisiana State University (LSU) utilizes microfabrication for a number of heat and mass transfer devices. These include cross flow heat exchangers, mechanical seals with integrated micro heat exchangers, catalytic converters, and micro reactors. In all...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en |
| Published: |
LSU
2004
|
| Subjects: | |
| Online Access: | http://etd.lsu.edu/docs/available/etd-04082004-102706/ |