Increasing the quality factor of microcantilevers in a fluid environment
The need to improve the quality factor of Atomic Force Microscopy cantileversimmersed in fluid has been demonstrated in great length, especially in the caseswhere samples need to be in their natural liquid environment. For that reasona series of low pressure chemical vapor deposited silicon nitride...
Main Author: | Castonguay, Francois |
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Other Authors: | Peter H Grutter (Internal/Supervisor) |
Format: | Others |
Language: | en |
Published: |
McGill University
2011
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Subjects: | |
Online Access: | http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=96942 |
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