Increasing the quality factor of microcantilevers in a fluid environment

The need to improve the quality factor of Atomic Force Microscopy cantileversimmersed in fluid has been demonstrated in great length, especially in the caseswhere samples need to be in their natural liquid environment. For that reasona series of low pressure chemical vapor deposited silicon nitride...

Full description

Bibliographic Details
Main Author: Castonguay, Francois
Other Authors: Peter H Grutter (Internal/Supervisor)
Format: Others
Language:en
Published: McGill University 2011
Subjects:
Online Access:http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=96942