A microcantilever platform for measuring internal friction in thin films using thermoelastic damping for calibration
Measuring structural damping due to internal friction in deposited thin films can provide useful guidelines for the design of high-Q micro/nanomechanical resonators utilized used for sensing, communications and vibration energy harvesting. Such measurements can also generate valuable insights into t...
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| Format: | Others |
| Language: | en |
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McGill University
2012
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| Online Access: | http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=106283 |