Design, assembly and validation of a system for measuring damping in microresonators

Miniaturized resonators are the critical components of microelectromechanical systems (MEMS) used for sensing, communications, imaging, and energy harvesting. For many of these applications, the important design parameters are the frequency of vibrations and the damping coefficient. Many mechanisms...

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Bibliographic Details
Main Author: Shalabi, Nabil
Other Authors: Srikar Vengallatore (Internal/Supervisor)
Format: Others
Language:en
Published: McGill University 2011
Subjects:
Online Access:http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=104652