Design, assembly and validation of a system for measuring damping in microresonators
Miniaturized resonators are the critical components of microelectromechanical systems (MEMS) used for sensing, communications, imaging, and energy harvesting. For many of these applications, the important design parameters are the frequency of vibrations and the damping coefficient. Many mechanisms...
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Format: | Others |
Language: | en |
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McGill University
2011
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Online Access: | http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=104652 |