A new method of temporal phase shifting using principle of stroboscopy for characterizing microstructures

A new method of temporal phase shifting using principle of stroboscopy for characterizing microstructures

Temporal Phase Shifting Interferometry is the most common method for characterization of surface, profile and displacement properties of micro devices. Common methods of phase shifting require PZT based devices that have inherent errors due to non-linearity. To avoid these errors during phase shifti...

Full description

Bibliographic Details
Main Author: Ali Zadeh, Davoud Mohammad
Format: Others
Published: 2009
Online Access:http://spectrum.library.concordia.ca/976504/1/MR63123.pdf
Ali Zadeh, Davoud Mohammad <http://spectrum.library.concordia.ca/view/creators/Ali_Zadeh=3ADavoud_Mohammad=3A=3A.html> (2009) A new method of temporal phase shifting using principle of stroboscopy for characterizing microstructures. Masters thesis, Concordia University.

Internet

http://spectrum.library.concordia.ca/976504/1/MR63123.pdf
Ali Zadeh, Davoud Mohammad <http://spectrum.library.concordia.ca/view/creators/Ali_Zadeh=3ADavoud_Mohammad=3A=3A.html> (2009) A new method of temporal phase shifting using principle of stroboscopy for characterizing microstructures. Masters thesis, Concordia University.

Similar Items