XeF2 gas phase micromachininig of silicon: modeling, equipment development and verification
The rapid progress in Micro-Electro Mechanical Systems necessitated the development of a micromachining technique in order to release micro-mechanical device in integrated chips. In the late 1990's there was a quest for a dry etchant that would not require an expensive setup, and overcome the p...
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2007
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| Online Access: | http://spectrum.library.concordia.ca/975500/1/MR34744.pdf Floarea, George <http://spectrum.library.concordia.ca/view/creators/Floarea=3AGeorge=3A=3A.html> (2007) XeF2 gas phase micromachininig of silicon: modeling, equipment development and verification. Masters thesis, Concordia University. |
Internet
http://spectrum.library.concordia.ca/975500/1/MR34744.pdfFloarea, George <http://spectrum.library.concordia.ca/view/creators/Floarea=3AGeorge=3A=3A.html> (2007) XeF2 gas phase micromachininig of silicon: modeling, equipment development and verification. Masters thesis, Concordia University.