Design, analysis and testing of rotary type micro thermal actuators
Micro electro mechanical system (MEMS) has opened a new horizon for realizing smaller physical systems. The current trend of developing any physical device for technological applications is to have smaller, economical, reliable and functional devices. MEMS has significantly scaled down the size of t...
| Main Author: | |
|---|---|
| Format: | Others |
| Published: |
2006
|
| Online Access: | http://spectrum.library.concordia.ca/9256/1/anwar_arefin_2006.pdf Anwar, M. Arefin <http://spectrum.library.concordia.ca/view/creators/Anwar=3AM=2E_Arefin=3A=3A.html> (2006) Design, analysis and testing of rotary type micro thermal actuators. Masters thesis, Concordia University. |