Modeling and parametric analysis of micro thermal actuators
The greatest promise of micro electro mechanical systems (MEMS) lies in the ability to produce mechanical motion on a small scale. Such devices typically run on low power and are fast, taking advantage of such micro scale phenomena as strong electrostatic forces and rapid thermal responses. MEMS-bas...
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2005
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| Online Access: | http://spectrum.library.concordia.ca/8521/1/MR10275.pdf Xu, Shijie <http://spectrum.library.concordia.ca/view/creators/Xu=3AShijie=3A=3A.html> (2005) Modeling and parametric analysis of micro thermal actuators. Masters thesis, Concordia University. |