Design and fabrication of surface textured MEMS for infrared gas sensors
This thesis concentrates primarily on optimum design and fabrication of novel MEMS (micro-electro-mechanical systems) infrared gas sensors. It deals with the thermal, electrical, optical and mechanical response for a spectroscopic gas sensor based on MEMS surface textured technologies. An overview...
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2004
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| Online Access: | http://spectrum.library.concordia.ca/8394/1/MR04402.pdf Sun, Liwei <http://spectrum.library.concordia.ca/view/creators/Sun=3ALiwei=3A=3A.html> (2004) Design and fabrication of surface textured MEMS for infrared gas sensors. Masters thesis, Concordia University. |