Analysis and testing of MEMS structures subjected to random environment

In many applications, MEMS structures are subjected to environments that are stochastic in nature. It could be random loading in the case of pressure sensors. On the other hand, due to random vibration of the body in which MEMS devices are attached, they are usually subjected to random base excitati...

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Bibliographic Details
Main Author: Ge, Jianliang
Format: Others
Published: 2004
Online Access:http://spectrum.library.concordia.ca/8243/1/MR04417.pdf
Ge, Jianliang <http://spectrum.library.concordia.ca/view/creators/Ge=3AJianliang=3A=3A.html> (2004) Analysis and testing of MEMS structures subjected to random environment. Masters thesis, Concordia University.

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