Analysis and testing of MEMS structures subjected to random environment
In many applications, MEMS structures are subjected to environments that are stochastic in nature. It could be random loading in the case of pressure sensors. On the other hand, due to random vibration of the body in which MEMS devices are attached, they are usually subjected to random base excitati...
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2004
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| Online Access: | http://spectrum.library.concordia.ca/8243/1/MR04417.pdf Ge, Jianliang <http://spectrum.library.concordia.ca/view/creators/Ge=3AJianliang=3A=3A.html> (2004) Analysis and testing of MEMS structures subjected to random environment. Masters thesis, Concordia University. |